PERSONAL DATA
Born December 29, 1957; U. S.
Citizen
EDUCATION
Ph.
D. in Materials Science, Massachusetts Institute of Technology, 1985:
Electronic Structure of Al2O3: VUV Reflectivity
Measurements from Room Temperature to 1100 °c. Thesis Adviser: R. L. Coble
B.
S. degree with distinction in Materials Science, Cornell University, 1979.
CURRENT RESEARCH INTERESTS
Optical
Property Based Electronic Structure Studies
Optics
and electronic structure of ceramics, polymers and optical materials:
VUV/UV/Vis spectroscopy.
Electronic
structure of interfaces: spatially
resolved valence electron energy loss spectroscopy (VEELS).
Electronic
structure, London dispersion forces, and Hamaker constants:
wetting of ceramic and polymeric surfaces and interfaces; retardation
of dispersion forces and novel wetting conditions.
Materials
and Microstructure Design
Materials
for sub-50 nm electronics: patterning, switches and interconnects.
Fluoropolymers
for 157nm IC photolithographic pellicles and photoresists.
Tunable
optical materials for attenuating phase shift photomasks for IC
photolithography: VUV/DUV
spectroscopic ellipsometry of complex multilayered and graded thin film
materials.
Light
scattering and near field interactions of complex microstructures and
particulate dispersions: computational optics using finite element solutions to
Maxwell’s Equations; Kubelka Munk analysis.
RESEARCH EXPERIENCE
University
of Pennsylvania: Adjunct Professor,
Dept. of Materials Science, 1996 to present.
DuPont
Co. Central Research:
Senior
Research Associate, May 2000 to present.
Research
Associate, Dec. 1996 to April 2000.
Senior
Research Scientist, Oct. 1992 to Nov. 1996.
Research
Scientist, Nov. 1985 to Sept. 1992.
Areas
of research at DuPont Co. Central Research and the University of Pennsylvania:
Bulk
Electronic Structure and Optical Properties of Ceramics, Optical Materials and
Polymers. Developed or studied:
·
VUV/UV/Vis spectrophotometer based
on samarium laser-plasma light source, dispersive analysis, and CO2
laser heating.
·
Temperature dependence of the
electronic structure of Al2O3 up to 2167K.
·
SrTiO3, Si3N4,
Al2O3, AlON, AlN, MgO-MgAl2O4, ZrO2,
LiB3O5, and BaB2O4.
·
Properties due to anion chemistry
in graded Cr-OxCyNz thin films.
·
Poly(di-alkylsilanes) polymers and
fluoropolymers.
Electronic
Structure of Interfaces.
Studied or performed:
·
Photoelectron spectroscopy of Cu:Al2O3
and Cu:AlN metal ceramic interfaces.
·
Quantitative analysis using
spatially resolved valence electron energy loss spectroscopy.
·
Interatomic bonding at a S11
grain boundary in Al2O3.
London
Dispersion Forces and Full Spectral Hamaker Constants for Wetting of Surfaces
and Interfaces
·
Hamaker Constants from VUV and SR-VEELS
spectroscopy and from AFM force distance curves.
·
In
situ determination of London
dispersion forces by VEELS of partially wetted interfaces in Si3N4.
·
Control of intergranular film
thickness by doping in thick film resistors.
·
Equilibrium surficial films or
bimodal wetting/nonwetting conditions due to retardation of dispersion.
Materials
For Semiconductor Photolithography
·
Fluoropolymer pellicles and
photoresists for 157nm lithography. Optimization
of transparency, radiation durability and photospeed.
·
Tunable optical materials for
attenuating phase shift photomasks for 365nm, 248nm, 193 nm and 157nm
lithography, based on Si3N4/TiN multilayers, graded Cr-OCN
thin films and organosilicates.
Light
Scattering by Complex Microstructures and Particulate Dispersions
·
Optical imaging calculations using
full field finite element solutions to Maxwell’s equations.
·
Diffuse reflectance and
transmission for Kubelka Munk analysis of particulate dispersions.
·
Near and far field interactions and
multiple scattering in complex microstructures.
Massachusetts
Institute of Technology:
Visiting
Research Scientist, Feb. 1986 to Feb. 1988.
Post-Doctoral
Associate, Oct. 1984 to Oct. 1985.
Graduate
Research Assistant, Feb. 1980 to Oct. 1984.
·
Thesis research on high temperature
electronic structure of single crystal Al2O3 up to 1400K, to understand high
temperature conductivity and defect chemistry of alumina.
Cornell
University:
Research
Assistant, May 1976 to May 1979.
·
Studied crack propagation using
mechanical testing and laser holographic interferometry.
TEACHING EXPERIENCE
Ph.
D. Thesis Advisor for three Univ. of Pennsylvania students.
Ph.
D. thesis committee member for seven students at Univ. of Pennsylvania, MIT,
Univ. of Toronto, and Stanford University.
Guest
Lecturer, Graduate and Undergraduate courses: Univ. of Pennsylvania, MIT, Univ.
of New Mexico, Harvard University.
Graduate
Teaching Assistant, MIT, Sept. 1979 to Jan. 1980.
PROFESSIONAL ACTIVITIES AND AWARDS
1999-2000
Chair of Basic Science Division, American Ceramic Society
1999
Fellow of the American Ceramic Society
1998-1999
Lithography Technology Working Group, 1999 Semiconductor Industry Assoc.
Roadmap
1998
Fulrath Award of the American Ceramic Society and Ceramic Society of
Japan
1997-2001
Officer of Basic Science Division, American Ceramic Society
1989- present
Associate Editor, Journal of the American Ceramic Society
1999
Organizing Committee, Acta Materialia Workshop on Ceramic and Bimaterial
Interfaces
1996-1997
Program Co-Chair, Gordon Conference on Solid State Studies in Ceramics
1995-1996
Program Chair, Basic Science Division, American Ceramic Society
1995
Co-Chair, Spectroscopy of Internal Interfaces, Schloss Ringberg, Germany
1994
Co-Chair, Interfaces in Ionic Materials, Schloss Ringberg, Germany
1993
Co-Chair, Science of Alumina, Schloss Ringberg, Germany
1989
R & D 100 Award
PROFESSIONAL
MEMBERSHIPS
American
Ceramic Society; American Chemical Society; American Physical Society; Materials
Research Society; Microscopy Society of America; Society for Optical Engineering
(SPIE); Photolithography Working Group (BACUS)
PUBLICATIONS, PRESENTATIONS AND PATENTS
98 publications. 119 presentations, 89 invited
talks. 7 patents issued, 9 filed.
