FACILITIES
Surface and Thin Film Analysis Facility
Penn Regional Nanotechnology Facility (PRNTF)
Location: Room 108, LRSM Building
Supervisor: Douglas Yates 215/898-2013
e-mail: dmyates@seas.upenn.edu
Oversight Committee Chair: Christopher B. Murray , MSE
The heart of this facility is an NEC 5SDH 1.7MV Pelletron Accelerator
- Thin film characterization is carried out in the PRNTF's Ion Scattering Laboratory. At the heart of this laboratory is the Pelletron Accelerator, which is capable of producing ion beams ranging from 0.2-5.1 MeV. The laboratory maintains three beam lines: (1) A General Purpose Station for Rutherford Backscattering, Particle Induced X-ray Emission and Forward Recoil Spectrometry, (2) a High Resolution Surface Structure Analysis Station with in situ heating and deposition, ion sputtering, a photoemission system, RBS, AES and LEED, and (3) and a Time-of-flight Molecular Beam Epitaxy station. A computer-controlled goniometer aids in the collection of channel maps for crystal structure orientation studies and ion implantation applications.
In addition the PRNTF facility has:
- PHI 600 Scanning Auger Multiprobe with 35nm SEM spot size, analytical resolution of 100 nm, in situ fracture stage and heating to 600oC. Equipped with dynamic and static Secondary Ion Mass Spectrometry for analysis of ppm level depth distribution of all elements.
- Atomic Force and Scanning Tunneling Microscopes Digital Nanoscope III and Dimension 3000
