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Table Of Contents: Quick Links To Papers
Reviews and Feature Articles
Optical Materials and Elements
Materials For Semiconductor Lithography
Materials and Optical Elements for Photovoltaics
Optical Properties and Electronic Structure of Materials
Ceramics, Optical Materials, Polymers and Molecular Materials.
Computational Optics of Complex Microstructures & Particulate Dispersions
Electronic Structure of Interfaces and Surfaces
Electrodynamic van der Waals – London Dispersion Interactions
London Dispersion Forces and Full Spectral Hamaker Constants of Surfaces and Interfaces
Optically Anisotropic Cylinders: Carbon Nanotubes
Long Range Interactions and Nanoscale Assembly
Curriculum Vitae
Publication List
Theses and Papers, Talks, Movies
Spectral Optical Properties Of Materials Data Files & SpecView Browser Applet
Software For Optical Properties, Electronic Structure and Electrodynamics
Gecko Hamaker: For Full Specral Hamaker Coefficients (Open Source, Cross Platform)
Electronic Structure Tools: Suite Of Computational Spectroscopy Programs
SpecView: Software for Spectral Viewing (Open Source, Cross Platform, from STSCI/John Hopkins)
MieTab: Open Source, Software For Mie Scattering Calculations (Open Source, from August Miller)
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- R. H. French, V. A. Parsegian, et al., “Long Range Interactions In Nanoscale Science”, Reviews Of Modern Physics, 82, 2, 1887-1944, (2010).
- R. H. French, H. V. Tran, “Immersion Lithography: Photomask and Wafer-Level Materials”, Vol. on “Materials Advances for Next-Generation Microelectronics”, Annual Reviews Of Materials Research, 39, 93-126 (2009). pdf download or full text html link
- R. H. French, “Origins and Applications of London Dispersion Forces and Hamaker Constants in Ceramics”, Centennial Feature Article, Journal of the American Ceramic Society, 83, 9, 2117-46 (2000).
- R. H. French, "Electronic Structure of a-Al2O3, with Comparison to AlON and AlN", Journal of the American Ceramic Society, 73, 3, 477-89 (1990).
Phase Shifters, Pellicles, Photoresists, Immersion Fluids
- R. H. French, H. V. Tran, “Immersion Lithography: Photomask and Wafer-Level Materials”, Vol. on “Materials Advances for Next-Generation Microelectronics”, Annual Reviews Of Materials Research, 39, 93-126 (2009).
- H. V. Tran, E. Hendrickx, F. Van Roey, G. Vandenberghe, R. H. French, “Fluid - Photoresist Interactions And Imaging In High Index Immersion Lithography”, Journal of Micro/Nanolithography, MEMS and MOEMS, 8(3), 033006 (2009).
- M. K. Yang, S. G. Kaplan, R. H. French, J. H. Burnett, “Index of Refraction of High Index Lithographic Immersion Fluids and its Variability”, Journal of Micro/Nanolithography, MEMS and MOEMS, 8(2), 023005, (2009).
- H. V. Tran, E. Hendrickx, R. H. French, D. J. Adelman, N. S. Rogado, M. Kaku, M. Mocella, J. J. Schmieg, C. Y. Chen, F. Van Roey, A. S. Bernfeld, R. A. Derryberry, “High Refractive Index Fluid Evaluations at 193 nm: Fluid Lifetime and Fluid/Resist Interaction Studies”, Journal of Photopolymer Science and Technology, 21 (5), 631-9 (2008).
- R. H. French, H. V. Tran, D. J. Adelman, N. S. Rogado, M. Kaku, M. Mocella, C. Y. Chen, E. Hendrickx, F. Van Roey, A. S. Bernfeld, R. A. Derryberry, “High Index Immersion Fluids Enabling Cost-Effective Single-Exposure Lithography For 32 nm Half Pitches”, Optical Microlithography XXI, SPIE Vol. AL6924-44, (2008).
- R. H. French, V. Liberman, H. V. Tran, J. Feldman, D. J. Adelman, R. C. Wheland, W. Qiu, S. J. McLain, M. K. Yang, M. F. Lemon, L. Brubaker, A. L. Shoe, B. Fones, K. Krohn, D. Hardy, C. Y. Chen, “High Index Immersion Lithography With Second Generation Immersion Fluids To Enable Numerical Apertures of 1.55 For Cost Effective 32 nm Half Pitches”, Optical Microlithography XX, SPIE Vol. ML6520-59, (2007).
- H. V. Tran, R. H. French, D. J. Adelman, J. Feldman, W. Qiu, R. C. Wheland, L. W. Brubaker, B. E. Fischel, B. B. Fones, M. F. Lemon, M. K. Yang, O. Nagao, M. Kaku, M. Mocella, and J. J. Schmieg, “Evaluation of Next Generation Fluids for ArF Immersion Lithography Beyond Water", Journal of Photopolymer Science and Technology, 20, 5, 729-38, (2007).
- R. H. French, W. Qiu, M. K. Yang, R. C. Wheland, M. F. Lemon, A. L. Shoe, D. J. Adelman, M. K. Crawford, H. V. Tran, J. Feldman, S. J. McLain, S. Peng, “Second Generation Fluids for 193nm Immersion Lithography”, Optical Microlithography XIX, SPIE Vol. ML6154-42, (2006).
- R. H. French, H. Sewell, M. K. Yang , S. Peng, D. McCafferty, W. Qiu, R. C. Wheland, M. F. Lemon, L. Markoya, M. K. Crawford, “Imaging Of 32-nm 1:1 Lines And Spaces Using 193-nm Immersion Interference Lithography With Second-Generation Immersion Fluids To Achieve A Numerical Aperture Of 1.5 And A k1 Of 0.25”, Journal of Microlithography, Microfabrication and Microsystems, Topical Issue on Hyper-NA Imaging, 4(3), 031103-1-14, (2005).
- S. Peng, R. H. French, W. Qiu, R. C. Wheland, M. K. Yang, M. F. Lemon, M. K. Crawford, “Second Generation Fluids for 193 nm Immersion Lithography”, Optical Microlithography XVIII, SPIE Vol. ML5754-76, (2005).
- K. Lee, S. Jockusch, N. J. Turro, R. H. French, R. C. Wheland, M. F. Lemon, A. M. Braun, T. Widerschpan, P. Zimmerman, “157 nm Pellicles for Photolithography: Mechanistic Investigation of the Deep UV Photolysis of Fluorocarbons”, Optical Microlithography XVII Proceedings of SPIE Vol. 5377, 1598-1605, (2004).
- R. R, Kunz., M. Switkes, R. Sinta, J. E. Curtin, R. H. French, R. C. Wheland, C. C. Kao, M. P. Mawn, L. Lin, P. Wetmore, V. Krukonis, K. Willams, “Transparent Fluids for 157 nm Immersion Lithography”, Journal of Microlithography, Microfabrication, and Microsystems, 3, 1, 73-83, (2004).
- R. H. French, R. C. Wheland, W. Qiu, M. F. Lemon, E. Zhang, J. Gordon, V. A. Petrov, V. F. Cherstkov, N. I. Delaygina, “Novel Hydrofluorocarbon Polymers for use as Pellicles in 157 nm Semiconductor Photolithography”, Journal of Fluorine Chemistry, 122, 63-80, (2003).
- A. E. Feiring, J. Feldman, F. L. Schadt III, K. W. Leffew, F. C. Zumsteg, M. K. Crawford, R. H. French. R. C. Wheland, V. A. Petrov, W. B. Farnham, “Design of Very Transparent Fluoropolymer Resists for Semiconductor Manufacture at 157 nm” Journal of Fluorine Chemistry, 122, 11-16, (2003).
- S. R. Lustig, E. D. Boyes, R. H. French, T. D. Gierke, M. A. Harmer, P. B. Hietpas, A. Jagota, R. S. McLean, G. P. Mitchell, G. B. Onoa, K. D. Sams, “Lithographically Cut Single-Walled Carbon Nanotubes with Controlled Length Distribution and End-Group Functionality”, Nano Letters, 3, 8, 1007-12, (2003).
- P. F. Carcia, R. H. French, M. H. Reilly, M. F. Lemon, D. J. Jones, “Optical Superlattices --- A Strategy for Designing Phase-shift Masks for Photolithography at 248 nm and 193 nm: Application to AlN/CrN”, Applied Physics Letters, 70, 2371-3 (1997).
- R. H. French, J. M. Rodríguez-Parada, M. K. Yang, R. A. Derryberry, M. F. Lemon, M. J. Brown, C. R. Haeger, S. L. Samuels, E. C. Romano, R. E. Richardson, “Optical Properties Of Materials For Concentrator Photovoltaic Systems”, Proceedings of 34th IEEE Photovoltaic Specialists Conference (PVSC), Philadelphia, PA June 7–12, 2009.
- Ordered By Material
- R. H. French, H. Müllejans, D. J. Jones, “Optical Properties of Aluminum Oxide: Determined from Vacuum Ultraviolet and Electron Energy Loss Spectroscopies”, Journal of the American Ceramic Society, 81, 10, 2549-57 (1998).
- R. H. French, D. J. Jones, S. Loughin, "Interband Electronic Structure of a-Al2O3 up to 2167 K", Journal of the American Ceramic Society, 77, 412-22 (1994).
- R. H. French, "Electronic Structure of a-Al2O3, with Comparison to AlON and AlN", Journal of the American Ceramic Society, 73, 3, 477-89 (1990).
- M. E. Innocenzi, R. T. Swimm, M. Bass, R. H. French, A. B. Villaverde, M. R. Kokta, "Room Temperature Optical Absorption in Undoped a-Al2O3", Journal of Applied Physics, 67, 12,7542-46 (1990).
- M. E. Innocenzi, R. T. Swimm, M. Bass, R. H. French, M. R. Kokta, "Optical Absorption in Undoped Yttrium Aluminum Garnet", Journal of Applied Physics, 68, 3, 1200-4 (1990).
- R. H. French, D. J. Jones, H. Müllejans, S. Loughin, A. D. Dorneich, P. F. Carcia, “Optical Properties of Aluminum Nitride: Determined from Vacuum Ultraviolet Spectroscopy and Spectroscopic Ellipsometry”, Journal of Materials Research, 14, 4337-44 (1999).
- S. Loughin, R. H. French, L. K. DeNoyer, W. -Y. Ching, Y. -N. Xu, "Critical Point Analysis of the Interband Transition Strength of Electrons", Journal of Physics D, 29 1740-50 (1996).
- S. Loughin, R. H. French, W. Y. Ching, Y. N. Xu, G. A. Slack, "Electronic Structure of Aluminum Nitride: Theory and Experiment", Applied Physics Letters, 63, 9, 1182-4 (1993).
- L. E. McNeil, M. Grimsditch, R. H. French, "Vibrational Spectroscopy of Aluminum Nitride", Journal American Ceramic Society., 76, 1132-36 (1993).
- Y. N. Xu, W. Y. Ching, R. H. French, "Electronic Structure and Interatomic Bonding of b-BaB2O4 Crystal with Comparison to LiB3O5", Physical Review B., 48, 24, 17695-702 (1993).
- R. H. French, J. W. Lin, F. S. Ohuchi, C. T. Chen, "Electronic Structure of b-BaB2O4 and LiB3O5 Nonlinear Optical Crystals”, Physical Review B., 44, 16, 8496-502 (1991).
- G. L. Tan, M. F. Lemon, R. H. French, “Optical Properties and London Dispersion Forces of Amorphous Silica Determined by Vacuum Ultraviolet Spectroscopy and Spectroscopic Ellipsometry”, Journal of the American Ceramic Society, 86, 11, 1885-92, (2003).
- K. van Benthem, C. Elsässer, R. H. French, “Bulk Electronic Structure of SrTiO3: Experiment and Theory”, Journal of Applied Physics, 90, 12, 6156-64, (2001).
- R. H. French, S. J. Glass, F. S. Ohuchi, Y.-N Xu, W. Y. Ching, "Experimental and Theoretical Studies on the Electronic Structure and Optical Properties of Three Phases of ZrO2", Physical Review B, 49, 8, 5133-42 (1994).
- M. K. Yang, R. H. French, E. W. Tokarsky, “Optical Properties of Teflon® AF Amorphous Fluoropolymers”, Journal of Micro/Nanolithography, MEMS and MOEMS, 7, 3, 033010, 1-9, (2008).
- W. Y. Ching, Y.-N. Xu, R. H. French, “First-Principles Investigation of the Optical Properties of Poly(di-n-hexylsilane)”, Physical Review B, 54, 19, 13546-50 (1996).
- R. H. French, J. S. Meth, J. R. G. Thorne, R. M. Hochstrasser, R. D. Miller, "Vacuum Ultraviolet Spectroscopy of the Optical Properties and Electronic Structure of Seven Poly(di-alkylsilanes)", Synthetic Metals, 50, 1-3, 499-508 (1992).
- F. M. Schellenberg, R. L. Byer, R. H. French, R. D. Miller, "Vacuum-ultraviolet Spectroscopy of Dialkyl Polysilanes", Physical Review B Rapid Communications, 43, 12, 10008-11 (1991).
- M. L. Bortz, R. H. French, "Optical Reflectivity Measurements Using a Laser Plasma Light Source" Applied Physics Letters, 55, 19, 1955-7 (1989).
- M. L. Bortz, R. H. French, "Quantitative, FFT-Based, Kramers Kronig Analysis for Reflectance Data", Applied Spectroscopy, 43, 8, 1498-1501 (1989).
- L.E. McNeil, R.H. French, “Light Scattering From Red Pigment Particles: Multiple Scattering in a Strongly Absorbing System”, Journal of Applied Physics, 89, 1, 283-93, (2001).
- L.E. McNeil, A.R. Hanuska, R. H. French, “Near-field scattering from red pigment particles: absorption and spectral dependence”, Journal of Applied Physics, 89, 3, 1898-1906, (2001).
- L. E. McNeil, A.R. Hanuska and R.H. French, “Orientation dependence in near-field scattering from TiO2 particles”, Applied Optics, 40, 22, 3726-36, (2001).
- L. E. McNeil, R. H. French, “Multiple scattering from Rutile TiO2 Particles”, Acta Materialia, 48, 4571-6, (2000).
- E. S. Thiele, R. H. French, “Light-Scattering Properties of Representative, Morphological Rutile Titania Particles Using a Finite-Element Method”, Journal of the American Ceramic Society, 81, 3, 469-79 (1998).
- E. S. Thiele, R. H. French, “Computation of Light Scattering by Anisotropic Spheres of Rutile Titania”, Advanced Materials, 10, 1271-76 (1998).
- A. D. Dorneich, R. H. French, H. Müllejans, S. Loughin, M. Rühle, “Quantitative Analysis of Valence Electron Energy-Loss Spectra of Aluminum Nitride”, Journal of Microscopy, 191, 3, 286-96 (1998).
- S. -D. Mo, W. Y. Ching, R. H. French, “Electronic Structure of a Near S11 a-axis Tilt Grain Boundary in a-Al2O3” Journal of the American Ceramic Society, 79, 627-33 (1996).
- S. -D. Mo, W. Y. Ching, R. H. French, “Optical Properties of a Near S11 a-axis Tilt Grain Boundary in a-Al2O3 ” Journal of Physics D, 29, 1761-66 (1996).
- H. Müllejans, R. H. French, "Interband Electronic Structure of a Near S11 Grain Boundary in a Alumina Determined by Spatially Resolved Valence Electron Energy-Loss Spectroscopy”, Journal of Physics D, 29, 1751-60 (1996).
- R. H. French, K. I. Winey, M. K. Yang, W. Qiu, “Optical Properties, Electronic Structure and Dispersion Interactions of Polystyrene”, Australian Journal of Chemistry,60, 251-63, (2007).
- G. L. Tan, M. F. Lemon, R. H. French, D. J. Jones, “Optical properties and London Dispersion Forces of Amorphous and Crystalline Silica Determined by Vacuum Ultraviolet Spectroscopy and Spectroscopy Ellipsometry”, Physical Review B, 72, 205117, p. 1-10, (2005).
- R. H. French, “Origins and Applications of London Dispersion Forces and Hamaker Constants in Ceramics”, Centennial Feature Article, Journal of the American Ceramic Society, 83, 9, 2117-46 (2000).
- R. H. French, R. M. Cannon, L. K. DeNoyer, Y.-M. Chiang, "Full Spectral Calculation of Non-Retarded Hamaker Constants for Ceramic Systems from Interband Transition Strengths", Solid State Ionics, 75, 13-33 (1995).
London Dispersion Forces & Full Spectral Hamaker Constants for Wetting of Surfaces and Interfaces
- R. Podgornik, R. H. French, V.A. Parsegian, “Non-additivity in Van der Waals Interactions Within Multilayers”, Journal of Chemical Physics, 124, 044709, p. 1-9, (2006).
- S. C. Fain, Jr, C. A. Polwarth, S. L. Tait, C. T. Campbell, R. H. French, “Simulated Measurement of Small Metal Clusters by Frequency-Modulation Non-Contact Atomic Force Microscopy (ncAFM)”, Nanotechnology, 17, S121–S127, (2006).
- K. van Benthem , G. Tan, R. H. French, L. K. Denoyer, R. Podgornik, V. A. Parsegian, “Graded Interface Models For More Accurate Determination of van der-Waals – London Dispersion Interactions Across Grain Boundaries”, Physical Review B, 74, 205110, p. 1-12, (2006).
- K. van Benthem, G. L. Tan, L. K. Denoyer, R. H. French, M. Rühle, “Local Optical Properties, Electron Densities and London Dispersion Energies of Atomically Structured Grain Boundaries” Physical Review Letters, 93, 227201, p. 1-4, (2004).
- K. van Benthem, R. H. French, W. Sigle C. Elsässer, M. Rühle, “Valence Electron Energy Loss Study of Fe Doped SrTiO3 and a S13 Boundary: Electronic Structure and Dispersion Forces”, Ultramicroscopy, 86, 3-4, 303-18, (2001).
- R. H. French, H. Müllejans, D. J. Jones, G. Duscher, R. M. Cannon, M. Rühle, “Dispersion Forces and Hamaker Constants for Intergranular Film in Silicon Nitride from Spatially Resolved-Valence Electron Energy Loss Spectrum Imaging”, Acta Materialia, 46, 7, 2271-87 (1998).
- C. Argento, R. H. French, “Parametric Tip Model and Force-Distance Relation for Hamaker Constant Determination from AFM”, Journal of Applied Physics, 80, 6081-90 (1996).
- H. D. Ackler, R. H. French, Y. M. Chiang, “Comparison of Hamaker Constants for Ceramic Systems with Intervening Vacuum or Water: From Force Laws and Physical Properties”, Journal of Colloid and Interface Science, 179, 460-69 (1996).
- Y. M. Chiang, L. E. Silverman, R. H. French, R. M. Cannon, "The Thin Glass Film between Ultrafine Conductor Particles in Thick Film Resistors", Journal of the American Ceramic Society, 77, 1143-52 (1994).
- R. Rajter, R. H. French, “van der Waals-London Dispersion Interaction Framework for Experimentally Realistic Carbon Nanotube Systems”, Int. J. Mat. Res., 101, in press (2010).
- A. Siber, R. Rajter, R. H. French, W. Y. Ching, A. Parsegian R. Podgornik, “Dispersion interactions between Optically Anisotropic Cylinders at all Separations: Retardation Effects for Insulating and Semiconducting Single Wall Carbon Nanotubes”, Physical Review B, 80, 165414 (2009).
- R. Rajter, R. H. French, R. Podgornik, W. Y. Ching, V. A. Parsegian, “Spectral Mixing Formulations for van der Waals – London Dispersion Interactions Between Multi-Component Carbon Nanotubes”, Journal Of Applied Physics, 104, 053513-1-13, (2008).
- R. F. Rajter, Ph. D. Thesis, "Chirality-Dependent, van der Waals - London Dispersion Interactions of Carbon Nanotube Systems", Dept. of Materials Science, Massachusetts Institute Of Technology, November 2008.
- R. Rajter, R. Podgornik, V. A Parsegian, R. H. French, W. Y. Ching, “van der Waals - London Dispersion Interactions for Optically Anisotropic Cylinders: Metallic and Semiconducting Single Wall Carbon Nanotubes”, Physical Review B., 76, 045417 (2007).
- R. F. Rajter, R. H. French, W. Y. Ching, W. C. Carter, Y. M. Chiang, “Calculating van der Waals - London Dispersion Spectra and Hamaker Coefficients of Carbon Nanotubes in Water from ab initio Optical Properties”, Journal of Applied Physics, 101, 054303, p. 1-5, (2007).
Long Range Interactions and Nanoscale Assembly
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Interfacial and Surficial Films |
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Silicon Nitride, Silicon Carbide, Silicon and Strontium Titanate |
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London Dispersion Forces |
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VUV Spectroscopy and Transmission and Reflection EELS
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Materials screening allows us to rapidly survey the optical properties
and electronic structure, along with the additional physical properties
which are required for a particular application. Once a broad
database of materials and properties has been established in the materials
screening phase then we embark on the materials development phase in which
the material is optimized to meet the multiple, and sometimes
contradictory, property requirements.
 
Optical property based electronic structure studies emphasize the interatomic bonding and interband transitions of materials, elucidating their physical
properties and opening the opportunity for materials optimization.
These studies form the basis for our materials and microstructure design
work, developing novel ceramic and polymeric materials for optical applications
which span from semiconductor photolithography to pigmented paints and
coatings.
 
Optical properties, such as the interband transition strength (Jcv), or the dielectric
constant (epsilon), serve as the quantitative electronic
structure basis for comparisons of experimental vacuum ultraviolet (VUV) reflectance results, spatially resolved (< 1 nm) valence electron energy loss
(SR-VEEL) results and theoretical LDA band structure results. This is accomplished
using Kramers Kronig dispersion analysis. Once the optical properties and
electronic structure tools have been developed we are ready for the next step.
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Using a Laser Plasma Light Source |
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1.5 to 44 eV, 800 nm to 28 nm |
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Bulk Electronic Structure Determination
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Using Scanning Transmission Electron Microscope |
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1 nm Spatial Resolution |
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2 to 1000 eV |
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For Interfacial Electronic Structure Determination
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Using Deuterium and Hg/Xe Light Sources |
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Magnesium Fluoride Optics and Polarizers |
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Optical Properties of Bulk and Thin Film Materials |
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Thin Film Microstructure Determination
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Full Field Solutions To Maxwell's Equations |
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Three Dimensional Finite Element Models |
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Time Domain Solutions |
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Optics of Complex Microstructures
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Contact Information
Roger H. French
Adjunct Professor of Materials Science
University of Pennsylvania
3231 Walnut St.
Philadelphia PA 19104
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